Han, Ja Hyung and Koo, Ja Eung and Hong, Duk Ho and Park, Byung Lyul and Kim, Seong Il and Cho, In-Soo and Eom, Dae Hong and Park, Jin Goo and Busnaina, Ahmed A.. (2005) Effects of Patterns on Corrosion in Cu CMP. Solid State Phenomena, 103-104. p. 369. ISSN 1662-9779
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Official URL: http://dx.doi.org/10.4028/www.scientific.net/SSP.1...
Item Type: | Article |
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InterNano Taxonomy: | Areas of Application > Electronics and Semiconductor Industries |
Collections: | Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for High-rate Nanomanufacturing |
Depositing User: | Amulya Gullapalli |
Date Deposited: | 17 Jul 2011 18:02 |
Last Modified: | 17 Jul 2011 18:02 |
URI: | http://eprints.internano.org/id/eprint/1033 |
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