Effects of Patterns on Corrosion in Cu CMP

Han, Ja Hyung and Koo, Ja Eung and Hong, Duk Ho and Park, Byung Lyul and Kim, Seong Il and Cho, In-Soo and Eom, Dae Hong and Park, Jin Goo and Busnaina, Ahmed A.. (2005) Effects of Patterns on Corrosion in Cu CMP. Solid State Phenomena, 103-104. p. 369. ISSN 1662-9779

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Item Type: Article
InterNano Taxonomy: Areas of Application > Electronics and Semiconductor Industries
Collections: Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for High-rate Nanomanufacturing
Depositing User: Amulya Gullapalli
Date Deposited: 17 Jul 2011 18:02
Last Modified: 17 Jul 2011 18:02
URI: http://eprints.internano.org/id/eprint/1033

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