Yao, Qing. (2005) Development of a novel piezo-driven parallel-kinematics single crystal silicon micropositioning XY stage. In: Smart Sensors, Actuators, and MEMS II.
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Official URL: http://dx.doi.org/10.1117/12.605632
| Item Type: | Conference or Workshop Item (Paper) |
|---|---|
| InterNano Taxonomy: | Nanomanufacturing Processes |
| Collections: | Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for Nanoscale Chemical-Electrical-Mechanical Manufacturing Systems |
| Depositing User: | Amulya Gullapalli |
| Date Deposited: | 21 Jul 2011 17:06 |
| Last Modified: | 21 Jul 2011 17:06 |
| URI: | http://eprints.internano.org/id/eprint/1486 |
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