Meitl, Matthew A. and Feng, Xue and Dong, Jingyan and Menard, Etienne and Ferreira, Placid M. and Huang, Yonggang and Rogers, John A.. (2007) Stress focusing for controlled fracture in microelectromechanical systems. Applied Physics Letters, 90 (8). 083110. ISSN 00036951
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Official URL: http://dx.doi.org/10.1063/1.2679072
| Item Type: | Article |
|---|---|
| InterNano Taxonomy: | Nanomanufacturing Characterization Techniques > Electrochemical Characterization |
| Collections: | Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for Nanoscale Chemical-Electrical-Mechanical Manufacturing Systems |
| Depositing User: | Amulya Gullapalli |
| Date Deposited: | 20 Jul 2011 21:39 |
| Last Modified: | 20 Jul 2011 21:39 |
| URI: | http://eprints.internano.org/id/eprint/1582 |
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