Nanotubular metal–insulator–metal capacitor arrays for energy storage

Banerjee, Parag and Perez, Israel and Henn-Lecordier, Laurent and Lee, Sang Bok and Rubloff, Gary W.. (2009) Nanotubular metal–insulator–metal capacitor arrays for energy storage. Nature Nanotechnology, 4 (5). p. 292. ISSN 1748-3387

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Nanostructured devices have the potential to serve as the basis for next-generation energy systems that make use of densely packed interfaces and thin films1. One approach to making such devices is to build multilayer structures of large area inside the open volume of a nanostructured template. Here, we report the use of atomic layer deposition to fabricate arrays of metal–insulator–metal nanocapacitors in anodic aluminium oxide nanopores. These highly regular arrays have a capacitance per unit planar area of 10 F cm-2 for 1-m-thick anodic aluminium oxide and 100 F cm-2 for 10-m-thick anodic aluminium oxide, significantly exceeding previously reported values for metal–insulator–metal capacitors in porous templates2, 3, 4, 5, 6. It should be possible to scale devices fabricated with this approach to make viable energy storage systems that provide both high energy density and high power density.

Item Type: Article
Additional Information: Reprinted by permission from Macmillan Publishers Ltd: Nature Nanotechnology (Parag, Banerjee, et al. "Nanotubular metal–insulator–metal capacitor arrays for energy storage." Nature Nanotechnology 4 (2009): 292-296. ), copyright 2009.
InterNano Taxonomy: Nanoscale Objects and Nanostructured Materials > Nanocomposites > Thin films
Nanomanufacturing Processes
Collections: Nanomanufacturing Research Collection
Related URLs:
Depositing User: Rebecca Reznik-Zellen
Date Deposited: 05 Nov 2009 21:37
Last Modified: 05 Nov 2009 21:37

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