Nanomoulding with amorphous metals

Kumar, Golden and Tang, Hong X. and Schroers, Jan. (2009) Nanomoulding with amorphous metals. Nature, 457 (7231). p. 868. ISSN 0028-0836

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Nanoimprinting promises low-cost fabrication of micro- and nano-devices by embossing features from a hard mould onto thermoplastic materials, typically polymers with low glass transition temperature1. The success and proliferation of such methods critically rely on the manufacturing of robust and durable master moulds2. Silicon-based moulds are brittle3 and have limited longevity4. Metal moulds are stronger than semiconductors, but patterning of metals on the nanometre scale is limited by their finite grain size. Amorphous metals (metallic glasses) exhibit superior mechanical properties and are intrinsically free from grain size limitations. Here we demonstrate direct nanopatterning of metallic glasses by hot embossing, generating feature sizes as small as 13 nm. After subsequently crystallizing the as-formed metallic glass mould, we show that another amorphous sample of the same alloy can be formed on the crystallized mould. In addition, metallic glass replicas can also be used as moulds for polymers or other metallic glasses with lower softening temperatures. Using this 'spawning' process, we can massively replicate patterned surfaces through direct moulding without using conventional lithography. We anticipate that our findings will catalyse the development of micro- and nanoscale metallic glass applications that capitalize on the outstanding mechanical properties, microstructural homogeneity and isotropy, and ease of thermoplastic forming exhibited by these materials5, 6, 7.

Item Type: Article
Additional Information: Reprinted by permission from Macmillan Publishers Ltd: Nature (Kumar, Golden, et al. "Nanomoulding with amorphous metals." Nature 457 (2008): 868-872.), copyright (2009)
InterNano Taxonomy: Nanoscale Objects and Nanostructured Materials
Collections: Nanomanufacturing Research Collection
Related URLs:
Depositing User: Rebecca Reznik-Zellen
Date Deposited: 05 Nov 2009 21:25
Last Modified: 05 Nov 2009 21:25

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