Lee, Jungchul and Spadaccini, Christopher M. and Mukerjee, Erik V. and King, William P.. (2008) Differential Scanning Calorimeter Based on Suspended Membrane Single Crystal Silicon Microhotplate. Journal of Microelectromechanical Systems, 17 (6). p. 1513. ISSN 1057-7157
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Official URL: http://dx.doi.org/10.1109/JMEMS.2008.2006811
| Item Type: | Article |
|---|---|
| InterNano Taxonomy: | Areas of Application > Electronics and Semiconductor Industries |
| Collections: | Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for Nanoscale Chemical-Electrical-Mechanical Manufacturing Systems |
| Depositing User: | Amulya Gullapalli |
| Date Deposited: | 20 Jul 2011 19:30 |
| Last Modified: | 20 Jul 2011 19:30 |
| URI: | http://eprints.internano.org/id/eprint/1620 |
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