A 100 nanometer scale resistive heater–thermometer on a silicon cantilever

Dai, Z and King, W P and Park, K. (2009) A 100 nanometer scale resistive heater–thermometer on a silicon cantilever. Nanotechnology, 20 (9). 095301. ISSN 0957-4484

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Item Type: Article
InterNano Taxonomy: Areas of Application > Electronics and Semiconductor Industries
Collections: Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for Nanoscale Chemical-Electrical-Mechanical Manufacturing Systems
Depositing User: Amulya Gullapalli
Date Deposited: 20 Jul 2011 19:28
Last Modified: 20 Jul 2011 19:28
URI: http://eprints.internano.org/id/eprint/1622

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