CMOS-Analogous Wafer-Scale Nanotube-on-Insulator Approach for Submicrometer Devices and Integrated Circuits Using Aligned Nanotubes

Ryu, Koungmin and Badmaev, Alexander and Wang, Chuan and Lin, Albert and Patil, Nishant and Gomez, Lewis and Kumar, Akshay and Mitra, Subhasish and Wong, H.-S. Philip and Zhou, Chongwu. (2009) CMOS-Analogous Wafer-Scale Nanotube-on-Insulator Approach for Submicrometer Devices and Integrated Circuits Using Aligned Nanotubes. Nano Letters, 9 (1). pp. 189-197. ISSN 1530-6984

Full text not available from this repository. (Request a copy)

Abstract

Massive aligned carbon nanotubes hold great potential but also face significant integration/assembly challenges for future beyond-silicon nanoelectronics. We report a wafer-scale processing of aligned nanotube devices and integrated circuits, including progress on essential technological components such as wafer-scale synthesis of aligned nanotubes, wafer-scale transfer of nanotubes to silicon wafers, metallic nanotube removal and chemical doping, and defect-tolerant integrated nanotube circuits. We have achieved synthesis of massive aligned nanotubes on complete 4 in. quartz and sapphire substrates, which were then transferred to 4 in. Si/SiO2 wafers. CMOS analogous fabrication was performed to yield transistors and circuits with features down to 0.5 μm, with high current density 20 μA/μm and good on/off ratios. In addition, chemical doping has been used to build fully integrated complementary inverter with a gain ~5, and a defect-tolerant design has been employed for NAND and NOR gates. This full-wafer approach could serve as a critical foundation for future integrated nanotube circuits.

Item Type: Article
Additional Information: Abstract reprinted with permission from the American Chemical Society.
InterNano Taxonomy: Nanoscale Objects and Nanostructured Materials > Nanodevice Structures > Nanoelectronic circuits and architectures
Nanoscale Objects and Nanostructured Materials > Nanotubes > Carbon nanotubes
Collections: Nanomanufacturing Research Collection
Related URLs:
Depositing User: Rebecca Reznik-Zellen
Date Deposited: 06 Nov 2009 18:50
Last Modified: 06 Nov 2009 18:50
URI: http://eprints.internano.org/id/eprint/164

Actions (login required)

View Item View Item