Vijayakumar, P. and Narayanan, P. and Koren, I. and Mani Krishna, C. and Moritz, C. A..
Impact of nanomanufacturing flow on systematic yield losses in nanoscale fabrics.
In: Nanoscale Architectures (NANOARCH), 2011 IEEE/ACM International Symposium on.
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Conference or Workshop Item
||bottom up fabrication, constant defect rates, fabrics, lithographic masks, mask overlay, masks, nanoelectronic circuits, nanoelectronics, nanofabrication, nanomanufacturing flow, nanoscale fabrics, nanowires, reliability, reliable manufacturing, scalable manufacturing, self assembly, systematic yield losses
||Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for Hierarchical Manufacturing
||19 Apr 2012 20:07
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