Aligned nanowires and nanodots by directed block copolymer assembly

Xiao, S. A. G. and Yang, X. M. and Lee, K. Y. and ver der Veerdonk, R. J. M. and Kuo, D. and Russell, T. P.. (2011) Aligned nanowires and nanodots by directed block copolymer assembly. Nanotechnology, 22 (30). ISSN 0957-4484

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Abstract

The directed self-assembly of block copolymers (BCPs) is a promising route to generate highly ordered arrays of sub-10 nm features. Ultradense arrays of a monolayer of spherical microdomains or cylindrical microdomains oriented parallel to the surface have been produced where the lateral ordering is guided by surface patterning and the lattice defined by the patterning can be commensurate or incommensurate with the natural period of the BCP. Commensurability between the two can be used to elegantly manipulate the lateral ordering and orientation of the BCP microdomains so as to form well-aligned arrays of 1D nanowires or 2D addressable nanodots. No modification of the substrate surface, aside from the patterning, was used, making the influence of lattice mismatch and pattern amplification on the size, shape and pitch of the BCP microdomains more transparent. A skew angle between incommensurate lattices, defining a stretching or compression of the BCP chains to compensate for the lattice mismatch, is presented.

Item Type: Article
InterNano Taxonomy: Nanoscale Objects and Nanostructured Materials > Nanostructured Materials > Block copolymers
Nanomanufacturing Processes > Self Assembly
Nanoscale Objects and Nanostructured Materials > Nanowires
Nanoscale Objects and Nanostructured Materials > Nanostructured Materials
Collections: Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for Hierarchical Manufacturing
Depositing User: Robert Stevens
Date Deposited: 03 May 2012 18:05
Last Modified: 03 May 2012 18:06
URI: http://eprints.internano.org/id/eprint/1800

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