Micro-Assembly using Elastomeric Surfaces with Switchable Dry Adhesion

Kim, Seok. Center for Nanoscale Chemical-Electrical-Mechanical Manufacturing Systems . (2012) Micro-Assembly using Elastomeric Surfaces with Switchable Dry Adhesion. Center for Nanoscale Chemical-Electrical-Mechanical Manufacturing Systems . (Unpublished)

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Abstract

This work presents a micromanufacturing method for constructing microsystems, which we term ‘micro-masonry’ based on individual manipulation, influenced by strategies for deterministic materials assembly using advanced forms of transfer printing. Analogous to masonry in construction sites, micro-masonry consists of the preparation, manipulation, and binding of microscale units to assemble microcomponents and microsystems. We used microtipped elastomeric stamps as manipulators and built three dimensional silicon microstructures [1]. Silicon units of varied shapes were fabricated in a suspended format on donors, retrieved, delivered, and placed on a target location on a receiver using microtipped stamps. Annealing of the assembled silicon units permanently bound them and completed the micro-masonry procedure.

Item Type: Other
Collections: Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for Nanoscale Chemical-Electrical-Mechanical Manufacturing Systems
Depositing User: Jessica Adamick
Date Deposited: 05 Oct 2012 18:35
Last Modified: 05 Oct 2012 18:35
URI: http://eprints.internano.org/id/eprint/1864

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