Graphoepitaxy of Self-Assembled Block Copolymers on Two-Dimensional Periodic Patterned Templates

Bita, I. and Yang, J. K. W. and Jung, Y. S. and Ross, C. A. and Thomas, E. L. and Berggren, K. K.. (2008) Graphoepitaxy of Self-Assembled Block Copolymers on Two-Dimensional Periodic Patterned Templates. Science, 321 (5891). pp. 939-943. ISSN 0036-8075

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Self-assembling materials are the building blocks of bottom-up nanofabrication processes, but they need to be templated to impose long-range order and eliminate defects. In this work, the self-assembly of a thin film of a spherical-morphology block copolymer is templated using an array of nanoscale topographical elements that act as surrogates for the minority domains of the block copolymer. The orientation and periodicity of the resulting array of spherical microdomains are governed by the commensurability between the block copolymer period and the template period and is accurately described by a free-energy model. This method, which forms high-spatial-frequency arrays using a lower-spatial-frequency template, will be useful in nanolithography applications such as the formation of high-density microelectronic structures. Reprinted with permission from AAAS.

Item Type: Article
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InterNano Taxonomy: Nanomanufacturing Processes > Deposition of Nanostructured Films or Nanostructures
Nanoscale Objects and Nanostructured Materials > Nanocomposites > Polymeric
Collections: Nanomanufacturing Research Collection
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Depositing User: Rebecca Reznik-Zellen
Date Deposited: 01 Oct 2009 18:42
Last Modified: 01 Oct 2009 18:42

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