Nanoimprinting Ultra Small and High Aspect Ratio Structures by using Rubber-toughened UV Cure Epoxy Resist

Shin, Y. J. ;. and Wu, Y. K. ;. and Guo, L. J.. (2013) Nanoimprinting Ultra Small and High Aspect Ratio Structures by using Rubber-toughened UV Cure Epoxy Resist. Nanotechnology.

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Item Type: Article
Collections: Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for Hierarchical Manufacturing
Depositing User: Robert Stevens
Date Deposited: 26 Mar 2014
Last Modified: 26 Mar 2014 19:43
URI: http://eprints.internano.org/id/eprint/2119

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