Template-Free Vibrational Indentation Patterning (VIP) of Micro/Nanometer-Scale Grating Structures with Real-Time Pitch and Angle Tunability

Ahn, S. H. and Ok, J. G. and Kwak, M. K. and Lee, K. T. and Lee, J. Y. and Guo, L. J.. (2013) Template-Free Vibrational Indentation Patterning (VIP) of Micro/Nanometer-Scale Grating Structures with Real-Time Pitch and Angle Tunability. Advanced Functional Materials, 23 (37). pp. 4739-4744.

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Abstract

A template-free, high-throughput patterning technique named vibrational indentation-driven patterning (VIP), which achieves continuous, period-tunable fabrication of micro/nanometer-scale grating structures, is reported. In VIP, a tilted edge of a hard material vertically vibrating at high frequency makes periodic indentations onto a moving substrate of any material softer than the tool, thereby continuously creating grating patterns at high speed. By modulating the tool vibration frequency, substrate feeding rate, and the tool tilting angle, the period-variable chirped gratings and angle-tunable blazed gratings can be easily achieved; they can be utilized in various optoelectronics and photonics applications. As an example, an infrared polarizer directly fabricated from the VIP-created blazed grating is demonstrated.

Item Type: Article
Additional Information: Ahn, Se Hyun Ok, Jong G. Kwak, Moon Kyu Lee, Kyu-Tae Lee, Jae Yong Guo, L. Jay
Collections: Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for Hierarchical Manufacturing
Depositing User: Robert Stevens
Date Deposited: 27 Mar 2014
Last Modified: 27 Mar 2014 20:21
URI: http://eprints.internano.org/id/eprint/2133

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