Hwang, David J. and Misra, Nipun and Grigoropoulos, Costas P. and Minor, Andrew M. and Mao, Samuel S.. (2008) In situ monitoring of material processing by a pulsed laser beam coupled via a lensed fiber into a scanning electron microscope. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 26 (6). p. 1432. ISSN 07342101
Full text not available from this repository.Abstract
In this study, a new method coupling laser irradiation into a dual-beam scanning electron microscope(SEM) and focused-ion-beam(FIB) system is developed. By using a lensed fiber, pulsed laser illumination could be successfully delivered onto the sample under SEM imaging, providing in situ monitoring for laser material processing applications including local modification of micro-/nanostructures and laser-assisted chemical vapor deposition. In situ characterization of the laser-induced features by high resolution SEM imaging and energy dispersive x-ray spectrometry was successfully carried out. Furthermore, in situ repair of a contaminated lensed fiber probe during laser-assisted chemical vapor deposition was demonstrated via FIB milling. The results demonstrate the full compatibility of the lensed fiber apparatus with the dual-beam apparatus without disturbing the original functions of the system. The combination of guided laser radiation with SEM and FIB instruments offers a powerful capability for in situ monitoring of multilevel laser-based micro- and nanoscale material processing.
| Item Type: | Article |
|---|---|
| Collections: | Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for Scalable and Integrated Nanomanufacturing |
| Depositing User: | Robert Stevens |
| Date Deposited: | 06 Oct 2014 21:01 |
| Last Modified: | 06 Oct 2014 21:01 |
| URI: | http://eprints.internano.org/id/eprint/2220 |
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