Gungor, M. Rauf and Watkins, James J. and Maroudas, Dimitrios. (2008) Mechanical behavior of ultralow-dielectric-constant mesoporous amorphous silica. Applied Physics Letters, 92 (25). p. 251903. ISSN 00036951
Full text not available from this repository. (Request a copy)Abstract
Using molecular-dynamics simulations, we examine the mechanical behavior of mesoporous amorphous silicas that are considered as ultralow-dielectric-constant materials in microelectronics. We study structures with a regular array of spherical pores and densities between 88% and 72% of the amorphous silica normal density. We find that the Young modulus depends on density according to a sublinear power-law scaling relationship and decreases with decreasing mesopore size. Upon uniaxial compression, an elastic instability is triggered in structures with less-than-critical density or mesopore size.
Item Type: | Article |
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InterNano Taxonomy: | Nanomanufacturing Characterization Techniques > Mechanical Property Characterization Nanoscale Objects and Nanostructured Materials > Nanostructured Materials > Low dielectric constant materials Nanomanufacturing Characterization Techniques Nanomanufacturing Characterization Techniques > Other Characterization Techniques > Molecular modeling |
Collections: | Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for Hierarchical Manufacturing Nanomanufacturing Research Collection |
Depositing User: | Moureen Kemei |
Date Deposited: | 25 Jan 2010 15:50 |
Last Modified: | 19 Sep 2011 21:41 |
URI: | http://eprints.internano.org/id/eprint/227 |
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