Mechanical behavior of ultralow-dielectric-constant mesoporous amorphous silica

Gungor, M. Rauf and Watkins, James J. and Maroudas, Dimitrios. (2008) Mechanical behavior of ultralow-dielectric-constant mesoporous amorphous silica. Applied Physics Letters, 92 (25). p. 251903. ISSN 00036951

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Using molecular-dynamics simulations, we examine the mechanical behavior of mesoporous amorphous silicas that are considered as ultralow-dielectric-constant materials in microelectronics. We study structures with a regular array of spherical pores and densities between 88% and 72% of the amorphous silica normal density. We find that the Young modulus depends on density according to a sublinear power-law scaling relationship and decreases with decreasing mesopore size. Upon uniaxial compression, an elastic instability is triggered in structures with less-than-critical density or mesopore size.

Item Type: Article
InterNano Taxonomy: Nanomanufacturing Characterization Techniques > Mechanical Property Characterization
Nanoscale Objects and Nanostructured Materials > Nanostructured Materials > Low dielectric constant materials
Nanomanufacturing Characterization Techniques
Nanomanufacturing Characterization Techniques > Other Characterization Techniques > Molecular modeling
Collections: Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for Hierarchical Manufacturing
Nanomanufacturing Research Collection
Depositing User: Moureen Kemei
Date Deposited: 25 Jan 2010 15:50
Last Modified: 19 Sep 2011 21:41

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