Kinetics of the ruthenium thin film deposition from supercritical carbon dioxide by the hydrogen reduction of Ru(tmhd)2cod

Karanikas, Christos F. and Watkins, James J.. (2009) Kinetics of the ruthenium thin film deposition from supercritical carbon dioxide by the hydrogen reduction of Ru(tmhd)2cod. Microelectronic Engineering, 87 (4). pp. 566-572. ISSN 01679317

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The kinetics of ruthenium thin film deposition via the hydrogen assisted reduction of bis(2,2,6,6-tetramethyl-3,5-heptanedionato)(1,5-cyclooctadiene)ruthenium(II) [Ru(tmhd)2cod] in supercritical carbon dioxide was studied. Deposition temperature was varied from 240 °C to 280 °C and the apparent activation energy was determined to be 45.3 kJ/mol. Deposition rates up to 30 nm/min were attained. The growth rate dependence on precursor concentration between 0 and 0.2 wt.% in CO2 was studied at 260 °C using excess hydrogen. The results indicated first order deposition kinetics with respect to precursor at concentrations lower than 0.06 wt.% and zero order dependence at concentrations above 0.06 wt.%. The ability to access regimes of zero order growth kinetics is advantageous for conformal depositions in high aspect ratio features. Growth rate was second order with respect to hydrogen at concentrations less than 0.26 wt.% and zero order at higher concentrations. The reaction byproducts, cyclooctadiene and cyclooctene, both had negative first order effects on growth rate while cyclooctane had a small negative impact on film growth rate. The effect of reaction pressure on the growth rate was studied at a constant reaction temperature of 260 °C and pressures between 159 bar and 200 bar and found to have no significant effect on the growth rate.

Item Type: Article
InterNano Taxonomy: Nanoscale Objects and Nanostructured Materials > Nanocomposites > Thin films
Nanomanufacturing Processes > Deposition of Nanostructured Films or Nanostructures
Nanomanufacturing Characterization Techniques
Collections: Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for Hierarchical Manufacturing
Nanomanufacturing Research Collection
Depositing User: Moureen Kemei
Date Deposited: 03 Mar 2010 22:40
Last Modified: 19 Sep 2011 21:09

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