Hwang, D.J. and Misra, N. and Grigoropoulos, C.P. and Minor, A.M. and Mao, S.S.. (2008) In situ monitoring of laser cleaning by coupling a pulsed laser beam with a scanning electron microscope. Applied Physics A, 91 (2). pp. 219-222. ISSN 0947-8396
Full text not available from this repository. (Request a copy)Abstract
Lasers have proved to be effective tools for material processing at the micron and nanometer scales. In particular, laser interaction with nanostructures offers the unique advantage of highly localized excitation and heating. In this study, a short-pulsed laser beam is coupled to a scanning electron microscope, without disturbing the microscopy function, in order to study in situ laser cleaning of individual submicron particles from a silicon substrate. The substrate conditions before and after particle removal were inspected by electron microscopy. The mechanisms of particle removal and the underlying dynamic coupling of the laser radiation associated with particle cleaning are investigated.
Item Type: | Article |
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Additional Information: | Laser cleaning |
InterNano Taxonomy: | Nanomanufacturing Characterization Techniques > Scanning Electron Microscopy (SEM) |
Collections: | Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for Scalable and Integrated Nanomanufacturing |
Depositing User: | Moureen Kemei |
Date Deposited: | 05 Apr 2010 19:33 |
Last Modified: | 26 Sep 2014 21:22 |
URI: | http://eprints.internano.org/id/eprint/407 |
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