In situ monitoring of laser cleaning by coupling a pulsed laser beam with a scanning electron microscope

Hwang, D.J. and Misra, N. and Grigoropoulos, C.P. and Minor, A.M. and Mao, S.S.. (2008) In situ monitoring of laser cleaning by coupling a pulsed laser beam with a scanning electron microscope. Applied Physics A, 91 (2). pp. 219-222. ISSN 0947-8396

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Abstract

Lasers have proved to be effective tools for material processing at the micron and nanometer scales. In particular, laser interaction with nanostructures offers the unique advantage of highly localized excitation and heating. In this study, a short-pulsed laser beam is coupled to a scanning electron microscope, without disturbing the microscopy function, in order to study in situ laser cleaning of individual submicron particles from a silicon substrate. The substrate conditions before and after particle removal were inspected by electron microscopy. The mechanisms of particle removal and the underlying dynamic coupling of the laser radiation associated with particle cleaning are investigated.

Item Type: Article
Additional Information: Laser cleaning
InterNano Taxonomy: Nanomanufacturing Characterization Techniques > Scanning Electron Microscopy (SEM)
Collections: Nanomanufacturing Research Collection
Depositing User: Moureen Kemei
Date Deposited: 05 Apr 2010 19:33
Last Modified: 05 Apr 2010 19:33
URI: http://eprints.internano.org/id/eprint/407

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