Microelectromechanical system microhotplates for reliability testing of thin films and nanowires

Aceros, Juan C. and McGruer, Nicol E. and Adams, George G.. (2008) Microelectromechanical system microhotplates for reliability testing of thin films and nanowires. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 26 (3). pp. 918-926. ISSN 10711023

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Item Type: Article
InterNano Taxonomy: Nanoscale Objects and Nanostructured Materials > Nanowires
Nanomanufacturing Characterization Techniques > Thermal Analysis > Thermal conductivity
Nanoscale Objects and Nanostructured Materials > Nanocomposites > Thin films
Nanoscale Objects and Nanostructured Materials > Nanodevice Structures
Collections: Nanomanufacturing Research Collection
Depositing User: Moureen Kemei
Date Deposited: 21 Apr 2010 19:34
Last Modified: 21 Apr 2010 19:34
URI: http://eprints.internano.org/id/eprint/436

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