Aceros, Juan C. and McGruer, Nicol E. and Adams, George G.. (2008) Microelectromechanical system microhotplates for reliability testing of thin films and nanowires. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 26 (3). pp. 918-926. ISSN 10711023
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Official URL: http://dx.doi.org/10.1116/1.2906263
| Item Type: | Article |
|---|---|
| InterNano Taxonomy: | Nanoscale Objects and Nanostructured Materials > Nanowires Nanomanufacturing Characterization Techniques > Thermal Analysis > Thermal conductivity Nanoscale Objects and Nanostructured Materials > Nanocomposites > Thin films Nanoscale Objects and Nanostructured Materials > Nanodevice Structures |
| Collections: | Nanomanufacturing Research Collection |
| Depositing User: | Moureen Kemei |
| Date Deposited: | 21 Apr 2010 19:34 |
| Last Modified: | 21 Apr 2010 19:34 |
| URI: | http://eprints.internano.org/id/eprint/436 |
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