KIM, T and YOO, Y and AHN, J and LEE, J and CHOI, J and BUSNAINA, A and PARK, J. (2008) Adhesion force change on multilayer EUVL mask due to laser induced plasma shock wave. In: 10th Annual SEMATECH Surface Preparation and Cleaning Conference (SPCC), APR 01-02, 2008, Austin, TX.
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Official URL: http://dx.doi.org/10.1016/j.mee.2008.10.016
| Item Type: | Conference or Workshop Item (Paper) |
|---|---|
| Uncontrolled Keywords: | Adhesion, Laser induced cleaning |
| InterNano Taxonomy: | Nanoscale Objects and Nanostructured Materials > Nanocomposites > Thin films |
| Collections: | Nanomanufacturing Research Collection |
| Depositing User: | Moureen Kemei |
| Date Deposited: | 12 May 2010 14:55 |
| Last Modified: | 12 May 2010 14:55 |
| URI: | http://eprints.internano.org/id/eprint/460 |
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