Carbon Nanotube Thin Film Transistors Based on Aerosol Methods

Zavodchikova, Marina Y and Kulmala, Tero and Nasibulin, Albert G and Ermolov, Vladimir and Franssila, Sami and Grigoras, Kestutis and Kauppinen, Esko I. (2009) Carbon Nanotube Thin Film Transistors Based on Aerosol Methods. Nanotechnology, 20 (8). 085201-085210. ISSN 0957-4484

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Abstract

We demonstrate a fabrication method for high-performance field-effect transistors (FETs) based on dry-processed random single-walled carbon nanotube networks (CNTNs) deposited at room temperature. This method is an advantageous alternative to solution-processed and direct CVD grown CNTN FETs, which allows using various substrate materials, including heat-intolerant plastic substrates, and enables an efficient, density-controlled, scalable deposition of as-produced single-walled CNTNs on the substrate directly from the aerosol (floating catalyst) synthesis reactor. Two types of thin film transistor (TFT) structures were fabricated to evaluate the FET performance of dry-processed CNTNs: bottom-gate transistors on Si/SiO2 substrates and top-gate transistors on polymer substrates. Devices exhibited on/off ratios up to 105 and field-effect mobilities up to 4 cm2 V−1 s−1. The suppression of hysteresis in the bottom-gate device transfer characteristics by means of thermal treatment in vacuum and passivation by an atomic layer deposited Al2O3 film was investigated. A 32 nm thick Al2O3 layer was found to be able to eliminate the hysteresis.

Item Type: Article
Uncontrolled Keywords: field effect transistors, carbon nanotube networks, fabrication process, aerosal methods
InterNano Taxonomy: Nanomanufacturing Processes > Deposition of Nanostructured Films or Nanostructures > Chemical vapor deposition (CVD)
Nanomanufacturing Processes > Deposition of Nanostructured Films or Nanostructures > Atomic layer deposition (ALD)
Nanoscale Objects and Nanostructured Materials > Nanodevice Structures
Nanoscale Objects and Nanostructured Materials > Nanotubes > Carbon nanotubes
Collections: Nanomanufacturing Research Collection
Related URLs:
Depositing User: Mr. Richard L Rosen
Date Deposited: 12 Jul 2010 18:46
Last Modified: 12 Jul 2010 18:46
URI: http://eprints.internano.org/id/eprint/484

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