Cheng, Joy Y. and Sanders, Daniel P. and Truong, Hoa D. and Harrer, Stefan and Friz, Alexander and Holmes, Steven and Colburn, Matthew and Hinsberg, William D.. (2010) Simple and Versatile Methods To Integrate Directed Self-Assembly with Optical Lithography Using a Polarity-Switched Photoresist. ACS Nano, 4 (8). p. 4815. ISSN 1936-0851Full text not available from this repository.
We report novel strategies to integrate block copolymer self-assembly with 193 nm water immersion lithography. These strategies employ commercially available positive tone chemically amplified photoresists to spatially encode directing information into precise topographical or chemical prepatterns for the directed self-assembly of block copolymers. Each of these methods exploits the advantageous solubility and thermal properties of polarity-switched positive tone photoresist materials. Precisely registered, sublithographic self-assembled structures are fabricated using these versatile integration schemes which are fully compatible with current optical lithography patterning materials, processes, and tooling. Keywords: directed self-assembly; graphoepitaxy; chemical epitaxy; block copolymer; photoresist
|InterNano Taxonomy:||Nanomanufacturing Processes > Assembly Techniques|
|Collections:||Nanomanufacturing Research Collection|
|Depositing User:||Amulya Gullapalli|
|Date Deposited:||12 Jul 2011 20:58|
|Last Modified:||12 Jul 2011 20:58|
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