Simon, Yoan C. and Moran, Isaac W. and Carter, Kenneth R. and Coughlin, E. Bryan. (2009) Silylcarborane Acrylate Nanoimprint Lithography Resists. ACS Applied Materials & Interfaces, 1 (9). p. 1887. ISSN 1944-8244
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Official URL: http://dx.doi.org/10.1021/am9002292
Item Type: | Article |
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InterNano Taxonomy: | Nanomanufacturing Processes |
Collections: | Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for Hierarchical Manufacturing |
Depositing User: | Amulya Gullapalli |
Date Deposited: | 16 Jul 2011 02:35 |
Last Modified: | 16 Jul 2011 02:35 |
URI: | http://eprints.internano.org/id/eprint/849 |
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