Silylcarborane Acrylate Nanoimprint Lithography Resists

Simon, Yoan C. and Moran, Isaac W. and Carter, Kenneth R. and Coughlin, E. Bryan. (2009) Silylcarborane Acrylate Nanoimprint Lithography Resists. ACS Applied Materials & Interfaces, 1 (9). p. 1887. ISSN 1944-8244

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Item Type: Article
InterNano Taxonomy: Nanomanufacturing Processes
Collections: Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for Hierarchical Manufacturing
Depositing User: Amulya Gullapalli
Date Deposited: 16 Jul 2011 02:35
Last Modified: 16 Jul 2011 02:35

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