Ell, John R. and Crosby, Todd A. and Peterson, Joseph J. and Carter, Kenneth R. and Watkins, James J.. (2010) Formation of SiO2Air-Gap Patterns Through scCO2Infusion of NIL Patterned PHEMA. Chemistry of Materials, 22 (4). p. 1445. ISSN 0897-4756
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Official URL: http://dx.doi.org/10.1021/cm902337t
| Item Type: | Article |
|---|---|
| InterNano Taxonomy: | Nanomanufacturing Processes |
| Collections: | Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for Hierarchical Manufacturing |
| ID Code: | 859 |
| Deposited By: | Amulya Gullapalli |
| Deposited On: | 15 Jul 2011 22:29 |
| Last Modified: | 15 Jul 2011 22:29 |
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