Synthesis of Fe metal precipitated colloidal silica and its application to W chemical mechanical polishing (CMP) slurry

Kang, Young-Jae and Prasad, Y. Nagendra and Kim, In-Kwon and Jung, Seok-Jo and Park, Jin-Goo. (2010) Synthesis of Fe metal precipitated colloidal silica and its application to W chemical mechanical polishing (CMP) slurry. Journal of Colloid and Interface Science, 349 (1). p. 402. ISSN 00219797

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Item Type: Article
InterNano Taxonomy: Areas of Application > Materials and Chemical Industries and Green Manufacturing
Collections: Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for High-rate Nanomanufacturing
Depositing User: Amulya Gullapalli
Date Deposited: 17 Jul 2011 19:39
Last Modified: 17 Jul 2011 19:39
URI: http://eprints.internano.org/id/eprint/976

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