Kang, Young-Jae and Prasad, Y. Nagendra and Kim, In-Kwon and Jung, Seok-Jo and Park, Jin-Goo. (2010) Synthesis of Fe metal precipitated colloidal silica and its application to W chemical mechanical polishing (CMP) slurry. Journal of Colloid and Interface Science, 349 (1). p. 402. ISSN 00219797
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Official URL: http://dx.doi.org/10.1016/j.jcis.2010.04.083
Item Type: | Article |
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InterNano Taxonomy: | Areas of Application > Materials and Chemical Industries and Green Manufacturing |
Collections: | Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for High-rate Nanomanufacturing |
Depositing User: | Amulya Gullapalli |
Date Deposited: | 17 Jul 2011 19:39 |
Last Modified: | 17 Jul 2011 19:39 |
URI: | http://eprints.internano.org/id/eprint/976 |
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