Karimi, Pegah and Kim, Taehoon and Aceros, Juan and Park, Jingoo and Busnaina, Ahmed A.. (2010) The removal of nanoparticles from sub-micron trenches using megasonics. Microelectronic Engineering, 87 (9). p. 1665. ISSN 01679317
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Official URL: http://dx.doi.org/10.1016/j.mee.2009.11.052
| Item Type: | Article |
|---|---|
| InterNano Taxonomy: | Nanoscale Objects and Nanostructured Materials |
| Collections: | Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for High-rate Nanomanufacturing |
| Depositing User: | Amulya Gullapalli |
| Date Deposited: | 17 Jul 2011 19:38 |
| Last Modified: | 17 Jul 2011 19:38 |
| URI: | http://eprints.internano.org/id/eprint/978 |
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