Park, S. and Lee, DH and Xu, J and Kim, B and Hong, SW and Jeong, U and Xu, T and Russell, TP. (2009) Macroscopic 10-Terabit-per-Square-Inch Arrays from Block Copolymers with Lateral Order. Science, 323 (5917). p. 1030. ISSN 00368075
Full text not available from this repository. (Request a copy)Abstract
Generating laterally ordered, ultradense, macroscopic arrays of nanoscopic elements will revolutionize the microelectronic and storage industries. We used faceted surfaces of commercially available sapphire wafers to guide the self- assembly of block copolymer microdomains into oriented arrays with quasi- long- range crystalline order over arbitrarily large wafer surfaces. Ordered arrays of cylindrical microdomains 3 nanometers in diameter, with areal densities in excess of 10 terabits per square inch, were produced. The sawtoothed substrate topography provides directional guidance to the self- assembly of the block copolymer, which is tolerant of surface defects, such as dislocations. The lateral ordering and lattice orientation of the single- grain arrays of microdomains are maintained over the entire surface. The approach described is parallel, applicable to different substrates and block copolymers, and opens a versatile route toward ultrahigh- density systems.
| Item Type: | Article |
|---|---|
| Uncontrolled Keywords: | THIN-FILMS; BOTTOM-UP; LITHOGRAPHY; GRAPHOEPITAXY; TEMPLATES; SURFACES; ROUTE |
| InterNano Taxonomy: | Nanoscale Objects and Nanostructured Materials |
| Collections: | Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for Hierarchical Manufacturing Nanomanufacturing Research Collection |
| Depositing User: | Danielle Federa |
| Date Deposited: | 16 Jun 2009 18:48 |
| Last Modified: | 19 Sep 2011 21:50 |
| URI: | http://eprints.internano.org/id/eprint/94 |
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