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Browse by Year where Taxonomy is "Nanomanufacturing Processes > Nanopatterning/Lithography > Advanced photolithography"
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Nanomanufacturing Processes
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Nanopatterning/Lithography
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Advanced photolithography
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2010
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2009
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2010
Smith, Henry I.
and
Walsh, Michael E.
and
Zhang, Feng
and
Ferrera, J.
and
Menon, Rajesh
. (2010)
High-Speed Maskless Photolithography for Customized Nanomanufacturing.
In: New England Nanomanufacturing Summit 2010, June 22 - 24, 2010, Lowell, MA. (Unpublished)
2009
Xiong, Yi
and
Liu, Zhaowei
and
Zhang, Xiang
. (2009)
A simple design of flat hyperlens for lithography and imaging with half-pitch resolution down to 20 nm.
Applied Physics Letters, 94 (20). p. 203108. ISSN 00036951