Browse by Year where Taxonomy is "Nanomanufacturing Processes > Nanopatterning/Lithography > Extreme ultraviolet (EUV) lithography"
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- InterNano Taxonomy (963)
- Nanomanufacturing Processes (320)
- Nanopatterning/Lithography (95)
- Extreme ultraviolet (EUV) lithography (5)
- Nanopatterning/Lithography (95)
- Nanomanufacturing Processes (320)
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2010
- Lee, JaeJong and Lee, SangRok. (2010) Nanoimprint Technology for Large Area Patterning and Its Applications. In: New England Nanomanufacturing Summit 2010, June 22 - 24, 2010, Lowell, MA. (Unpublished)
- Morse, Jeffrey. National Nanomanufacturing Network. (2010) NENS 2010: Nanomanufacturing Stakeholders Provide Insights into Challenges, Benefits, and Societal Impact. NNN Newsletters, 3 (6).
2008
- Moran, Isaac W. and Jhaveri, Sarav B. and Carter, Kenneth R.. (2008) Patterned Layers of a Semiconducting Polymer via Imprinting and Microwave-Assisted Grafting. Small, 4 (8). pp. 1176-1182. ISSN 16136810
- Moran, Isaac W. and Cheng, Dalton F. and Jhaveri, Sarav B. and Carter, Kenneth R.. (2008) High-resolution soft lithography of thin film resists enabling nanoscopic pattern transfer. Soft Matter, 4 (1). pp. 168-176. ISSN 1744-683X
2007
- Hagberg, Erik C. and Hart, Mark W. and Cong, Lianhui and Allen, Christopher W. and Carter, Kenneth R.. (2007) Cyclophosphazene-containing Polymers as Imprint Lithography Resists. Journal of Inorganic and Organometallic Polymers and Materials, 17 (2). pp. 377-385. ISSN 1574-1443
