Items where Taxonomy is "Nanomanufacturing Processes > Nanopatterning/Lithography > Extreme ultraviolet (EUV) lithography" and Year is 2010

L

Lee, JaeJong and Lee, SangRok. (2010) Nanoimprint Technology for Large Area Patterning and Its Applications. In: New England Nanomanufacturing Summit 2010, June 22 - 24, 2010, Lowell, MA. (Unpublished)

M

Morse, Jeffrey. National Nanomanufacturing Network. (2010) NENS 2010: Nanomanufacturing Stakeholders Provide Insights into Challenges, Benefits, and Societal Impact. NNN Newsletters, 3 (6).