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Jingyan, Dong and Ferreira, P.M.. (2009) Electrostatically Actuated Cantilever With SOI-MEMS Parallel Kinematic <formula formulatype="inline"><tex Notation="TeX">$XY$</tex></formula> Stage. Journal of Microelectromechanical Systems, 18 (3). p. 641. ISSN 1057-7157

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