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Kim, Tae-Gon and Wostyn, Kurt and Mertens, Paul W and Busnaina, Ahmed A and Park, Jin-Goo. (2009) Collapse behavior and forces of multistack nanolines. Nanotechnology, 21 (1). 015708. ISSN 0957-4484

Kim, Tae-Gon and Yoo, Young-Sam and Kim, Tae-Geun and Ahn, Jinho and Lee, Jong-Myoung and Choi, Jae-Sung and Busnaina, Ahmed A. and Park, Jin-Goo. (2008) Damage Free Particle Removal from Extreme Ultraviolet Lithography Mask Layers by High Energy Laser Shock Wave Cleaning. In: 20th International Microprocesses and Nanotechnology Conference, Nov 05-08, 2007, Kyoto, Japan.

Park, Jin-Goo and Lee, Sang-Ho and Ryu, Ju-Suk and Hong, Yi-Koan and Kim, Tae-Gon and Busnaina, Ahmed A.. (2006) Interfacial and Electrokinetic Characterization of IPA Solutions Related to Semiconductor Wafer Drying and Cleaning. Journal of The Electrochemical Society, 153 (9). G811. ISSN 00134651

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