Number of items: 3.
Kim, Tae-Gon and Wostyn, Kurt and Mertens, Paul W and Busnaina, Ahmed A and Park, Jin-Goo. (2009) Collapse behavior and forces of multistack nanolines. Nanotechnology, 21 (1). 015708. ISSN 0957-4484
Kim, Tae-Gon and Yoo, Young-Sam and Kim, Tae-Geun and Ahn, Jinho and Lee, Jong-Myoung and Choi, Jae-Sung and Busnaina, Ahmed A. and Park, Jin-Goo. (2008) Damage Free Particle Removal from Extreme Ultraviolet Lithography Mask Layers by High Energy Laser Shock Wave Cleaning. In: 20th International Microprocesses and Nanotechnology Conference, Nov 05-08, 2007, Kyoto, Japan.
Park, Jin-Goo and Lee, Sang-Ho and Ryu, Ju-Suk and Hong, Yi-Koan and Kim, Tae-Gon and Busnaina, Ahmed A.. (2006) Interfacial and Electrokinetic Characterization of IPA Solutions Related to Semiconductor Wafer Drying and Cleaning. Journal of The Electrochemical Society, 153 (9). G811. ISSN 00134651
This list was generated on Fri May 25 09:15:03 2012 EDT.
