Kim, Tae Gon and Wostyn, Kurt and Park, Jin Goo and Mertens, Paul W. and Busnaina, Ahmed A.. (2009) Pattern Collapse and Particle Removal Forces of Interest to Semiconductor Fabrication Process. Solid State Phenomena, 145-146 . p. 47. ISSN 1662-9779
Full text not available from this repository.
Official URL: http://dx.doi.org/10.4028/www.scientific.net/SSP.1...
| Item Type: | Article |
|---|---|
| InterNano Taxonomy: | Nanoscale Objects and Nanostructured Materials > Nanoparticles |
| Collections: | Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for High-rate Nanomanufacturing |
| ID Code: | 1009 |
| Deposited By: | Amulya Gullapalli |
| Deposited On: | 17 Jul 2011 14:37 |
| Last Modified: | 17 Jul 2011 14:37 |
Repository Staff Only: item control page
