Kim, Tae Gon and Wostyn, Kurt and Park, Jin Goo and Mertens, Paul W. and Busnaina, Ahmed A.. (2009) Pattern Collapse and Particle Removal Forces of Interest to Semiconductor Fabrication Process. Solid State Phenomena, 145-146. p. 47. ISSN 1662-9779
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Official URL: http://dx.doi.org/10.4028/www.scientific.net/SSP.1...
| Item Type: | Article |
|---|---|
| InterNano Taxonomy: | Nanoscale Objects and Nanostructured Materials > Nanoparticles |
| Collections: | Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for High-rate Nanomanufacturing |
| Depositing User: | Amulya Gullapalli |
| Date Deposited: | 17 Jul 2011 18:37 |
| Last Modified: | 17 Jul 2011 18:37 |
| URI: | http://eprints.internano.org/id/eprint/1009 |
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