Bakhtari, Kaveh and Guldiken, Rasim O. and Busnaina, Ahmed A. and Park, Jin-Goo. (2006) Experimental and Analytical Study of Submicrometer Particle Removal from Deep Trenches. Journal of The Electrochemical Society, 153 (9). C603. ISSN 00134651
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Official URL: http://dx.doi.org/10.1149/1.2214531
Item Type: | Article |
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InterNano Taxonomy: | Areas of Application > Electronics and Semiconductor Industries |
Collections: | Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for High-rate Nanomanufacturing |
Depositing User: | Amulya Gullapalli |
Date Deposited: | 17 Jul 2011 18:24 |
Last Modified: | 17 Jul 2011 18:24 |
URI: | http://eprints.internano.org/id/eprint/1017 |
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