Experimental and Analytical Study of Submicrometer Particle Removal from Deep Trenches

Bakhtari, Kaveh and Guldiken, Rasim O. and Busnaina, Ahmed A. and Park, Jin-Goo. (2006) Experimental and Analytical Study of Submicrometer Particle Removal from Deep Trenches. Journal of The Electrochemical Society, 153 (9). C603. ISSN 00134651

Full text not available from this repository.
Item Type: Article
InterNano Taxonomy: Areas of Application > Electronics and Semiconductor Industries
Collections: Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for High-rate Nanomanufacturing
Depositing User: Amulya Gullapalli
Date Deposited: 17 Jul 2011 18:24
Last Modified: 17 Jul 2011 18:24
URI: http://eprints.internano.org/id/eprint/1017

Actions (login required)

View Item View Item