Field-assisted nanopatterning of metals, metal oxides and metal salts

Liu, Jun-Fu and Miller, GP. (2009) Field-assisted nanopatterning of metals, metal oxides and metal salts. Nanotechnology, 20 (5). 055303. ISSN 09574484

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Abstract

The tip-based nanofabrication method called field-assisted nanopatterning or FAN has now been extended to the transfer of metals, metal oxides and metal salts onto various receiving substrates including highly ordered pyrolytic graphite, passivated gold and indium-tin oxide. Standard atomic force microscope tips were first dip-coated using suspensions of inorganic compounds in solvent. The films prepared in this manner were non-uniform and contained inorganic nanoparticles. Tip-based nanopatterning on chosen substrates was conducted under high electric field conditions. The same tip was used for both nanofabrication and imaging. Arbitrary patterns were formed with dimensions that ranged from tens of microns to sub-20 nm and were controlled by tuning the tip bias during fabrication. Most tip-based nanopatterning techniques are limited in terms of the type of species that can be deposited and the type of substrates onto which the deposition occurs. With the successful deposition of inorganic species reported here, FAN is demonstrated to be a truly versatile tip-based nanofabrication technique that is useful for the deposition of a wide variety of both organic and inorganic species including small molecules, large molecules and polymers.

Item Type: Article
Uncontrolled Keywords: ATOMIC-FORCE MICROSCOPE; SILICON SURFACES; NANOLITHOGRAPHY; NANOFABRICATION; OXIDATION; TITANIUM; FILM; TIP; AIR
InterNano Taxonomy: Nanomanufacturing Processes > Nanopatterning/Lithography
Collections: Nanomanufacturing Research Collection
Depositing User: Danielle Federa
Date Deposited: 15 Jun 2009 20:04
Last Modified: 15 Jun 2009 20:04
URI: http://eprints.internano.org/id/eprint/106

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