Design, fabrication and testing of a silicon-on-insulator (SOI) MEMS parallel kinematics XY stage

Dong, Jingyan and Mukhopadhyay, Deepkishore and Ferreira, Placid M. (2007) Design, fabrication and testing of a silicon-on-insulator (SOI) MEMS parallel kinematics XY stage. Journal of Micromechanics and Microengineering, 17 (6). p. 1154. ISSN 0960-1317

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Item Type: Article
InterNano Taxonomy: Nanomanufacturing Processes
Areas of Application > Electronics and Semiconductor Industries
Collections: Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for Nanoscale Chemical-Electrical-Mechanical Manufacturing Systems
Depositing User: Amulya Gullapalli
Date Deposited: 21 Jul 2011 16:10
Last Modified: 19 Sep 2011 16:45
URI: http://eprints.internano.org/id/eprint/1541

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