Dong, Jingyan and Mukhopadhyay, Deepkishore and Ferreira, Placid M. (2007) Design, fabrication and testing of a silicon-on-insulator (SOI) MEMS parallel kinematics XY stage. Journal of Micromechanics and Microengineering, 17 (6). p. 1154. ISSN 0960-1317
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Official URL: http://dx.doi.org/10.1088/0960-1317/17/6/008
Item Type: | Article |
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InterNano Taxonomy: | Nanomanufacturing Processes Areas of Application > Electronics and Semiconductor Industries |
Collections: | Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for Nanoscale Chemical-Electrical-Mechanical Manufacturing Systems |
Depositing User: | Amulya Gullapalli |
Date Deposited: | 21 Jul 2011 16:10 |
Last Modified: | 19 Sep 2011 16:45 |
URI: | http://eprints.internano.org/id/eprint/1541 |
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