From Nanorings to Nanodots by Patterning with Block Copolymers

Park, Soojin and Wang, Jia-Yu and Kim, Bokyung and Russell, Thomas P.. (2008) From Nanorings to Nanodots by Patterning with Block Copolymers. Nano Letters, 8 (6). pp. 1667-1672. ISSN 1530-6984

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We demonstrate three different transfer patterns that can be achieved by use of a surface reconstructed block copolymer film where metal is evaporated onto the surface of the film, providing the contrast. Thin films of diblock copolymers having cylindrical microdomains oriented normal to the surface with long-range lateral order were used. Solvent reconstruction of the film, followed by a glancing angle metal evaporation and thermal annealing, led to three different decorations of the films with gold. These films were used as masks for pattern transfer of pores, columns, and rings to underlying substrate with high fidelity.

Item Type: Article
Additional Information: Reprinted with permission from "From Nanorings to Nanodots by Patterning with Block Copolymers", T Russell et al., Advanced Materials 20(4) pg 1667-1672. Copyright 2008 American Chemical Society.
InterNano Taxonomy: Nanoscale Objects and Nanostructured Materials > Nanostructured Materials > Block copolymers
Nanoscale Objects and Nanostructured Materials
Nanomanufacturing Processes > Nanopatterning/Lithography
Nanomanufacturing Characterization Techniques > Scanning Probe Microscopy
Collections: Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for Hierarchical Manufacturing
Nanomanufacturing Research Collection
Depositing User: Moureen Kemei
Date Deposited: 17 Feb 2010 19:27
Last Modified: 19 Sep 2011 21:27

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