Ablation of thin metal films by short-pulsed lasers coupled through near-field scanning optical microscopy probes

Hwang, David Jen and Chimmalgi, Anant and Grigoropoulos, Costas P.. (2006) Ablation of thin metal films by short-pulsed lasers coupled through near-field scanning optical microscopy probes. Journal of Applied Physics, 99 (4). 044905. ISSN 00218979

Full text not available from this repository. (Request a copy)

Abstract

Short-pulsed lasers have been proven to be useful tools for precise modification of electronic materials. In conventional lens focusing schemes, the minimum feature size is determined by the diffraction limit. Finer resolution is accomplished by combining pulsed laser radiation with near-field scanning optical microscopy (NSOM) probes. In this study, short laser pulses are coupled to a fiber-based NSOM in order to ablate thin metal films. A detailed parametric study on the effects of probe aperture size, laser pulse energy, temporal width, and environment gas is performed. The significance of lateral thermal diffusion is highlighted and the dependence of the ablation process on the imparted near-field distribution is revealed.

Item Type: Article
InterNano Taxonomy: Nanoscale Objects and Nanostructured Materials > Nanocomposites > Thin films
Nanomanufacturing Characterization Techniques > Scanning Probe Microscopy > Near-field scanning optical microscopy (NSOM)
Collections: Nanomanufacturing Research Collection
Depositing User: Moureen Kemei
Date Deposited: 24 Mar 2010 18:56
Last Modified: 24 Mar 2010 18:56
URI: http://eprints.internano.org/id/eprint/358

Actions (login required)

View Item View Item