Hwang, David Jen and Chimmalgi, Anant and Grigoropoulos, Costas P.. (2006) Ablation of thin metal films by short-pulsed lasers coupled through near-field scanning optical microscopy probes. Journal of Applied Physics, 99 (4). 044905. ISSN 00218979
Full text not available from this repository. (Request a copy)Abstract
Short-pulsed lasers have been proven to be useful tools for precise modification of electronic materials. In conventional lens focusing schemes, the minimum feature size is determined by the diffraction limit. Finer resolution is accomplished by combining pulsed laser radiation with near-field scanning optical microscopy (NSOM) probes. In this study, short laser pulses are coupled to a fiber-based NSOM in order to ablate thin metal films. A detailed parametric study on the effects of probe aperture size, laser pulse energy, temporal width, and environment gas is performed. The significance of lateral thermal diffusion is highlighted and the dependence of the ablation process on the imparted near-field distribution is revealed.
| Item Type: | Article |
|---|---|
| InterNano Taxonomy: | Nanoscale Objects and Nanostructured Materials > Nanocomposites > Thin films Nanomanufacturing Characterization Techniques > Scanning Probe Microscopy > Near-field scanning optical microscopy (NSOM) |
| Collections: | Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for Scalable and Integrated Nanomanufacturing |
| Depositing User: | Moureen Kemei |
| Date Deposited: | 24 Mar 2010 18:56 |
| Last Modified: | 30 Sep 2014 15:10 |
| URI: | http://eprints.internano.org/id/eprint/358 |
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