Pandey, Sumeet C. and Singh, Tejinder and Maroudas, Dimitrios. (2009) Kinetic Monte Carlo simulations of surface growth during plasma deposition of silicon thin films. The Journal of Chemical Physics, 131 (3). 034503. ISSN 00219606
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Official URL: http://dx.doi.org/10.1063/1.3152846
Item Type: | Article |
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InterNano Taxonomy: | Nanomanufacturing Characterization Techniques |
Collections: | Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for Hierarchical Manufacturing |
Depositing User: | Amulya Gullapalli |
Date Deposited: | 16 Jul 2011 20:48 |
Last Modified: | 16 Jul 2011 20:48 |
URI: | http://eprints.internano.org/id/eprint/836 |
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