Kinetic Monte Carlo simulations of surface growth during plasma deposition of silicon thin films

Pandey, Sumeet C. and Singh, Tejinder and Maroudas, Dimitrios. (2009) Kinetic Monte Carlo simulations of surface growth during plasma deposition of silicon thin films. The Journal of Chemical Physics, 131 (3). 034503. ISSN 00219606

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Item Type: Article
InterNano Taxonomy: Nanomanufacturing Characterization Techniques
Collections: Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for Hierarchical Manufacturing
Depositing User: Amulya Gullapalli
Date Deposited: 16 Jul 2011 20:48
Last Modified: 16 Jul 2011 20:48
URI: http://eprints.internano.org/id/eprint/836

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