Park, Jin-Goo and Lee, Sang-Ho and Ryu, Ju-Suk and Hong, Yi-Koan and Kim, Tae-Gon and Busnaina, Ahmed A.. (2006) Interfacial and Electrokinetic Characterization of IPA Solutions Related to Semiconductor Wafer Drying and Cleaning. Journal of The Electrochemical Society, 153 (9). G811. ISSN 00134651
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Official URL: http://dx.doi.org/10.1149/1.2214532
| Item Type: | Article |
|---|---|
| InterNano Taxonomy: | Areas of Application > Electronics and Semiconductor Industries |
| Collections: | Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for High-rate Nanomanufacturing |
| Depositing User: | Amulya Gullapalli |
| Date Deposited: | 17 Jul 2011 18:12 |
| Last Modified: | 17 Jul 2011 18:12 |
| URI: | http://eprints.internano.org/id/eprint/1026 |
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