Metrology and Removal of Nanoparticles from 500 Micron Deep Trenches

Guldiken, O. and Bakhtari, K. and Busnaina, Ahmed A. and Park, J.. (2005) Metrology and Removal of Nanoparticles from 500 Micron Deep Trenches. Solid State Phenomena, 103-104. p. 137. ISSN 1662-9779

Full text not available from this repository.
Item Type: Article
InterNano Taxonomy: Nanomanufacturing Characterization Techniques
Collections: Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for High-rate Nanomanufacturing
Depositing User: Amulya Gullapalli
Date Deposited: 17 Jul 2011 18:04
Last Modified: 17 Jul 2011 18:04
URI: http://eprints.internano.org/id/eprint/1032

Actions (login required)

View Item View Item