YAO, Q and DONG, J and FERREIRA, P. (2007) Design, analysis, fabrication and testing of a parallel-kinematic micropositioning XY stage. International Journal of Machine Tools and Manufacture, 47 (6). p. 946. ISSN 08906955
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Official URL: http://dx.doi.org/10.1016/j.ijmachtools.2006.07.00...
| Item Type: | Article |
|---|---|
| InterNano Taxonomy: | Areas of Application > Electronics and Semiconductor Industries Nanomanufacturing Characterization Techniques |
| Collections: | Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for Nanoscale Chemical-Electrical-Mechanical Manufacturing Systems |
| Depositing User: | Amulya Gullapalli |
| Date Deposited: | 21 Jul 2011 16:08 |
| Last Modified: | 19 Sep 2011 16:47 |
| URI: | http://eprints.internano.org/id/eprint/1544 |
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