Dong, Jingyan and Ferreira, Placid M. (2008) Simultaneous actuation and displacement sensing for electrostatic drives. Journal of Micromechanics and Microengineering, 18 (3). 035011. ISSN 0960-1317
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Official URL: http://dx.doi.org/10.1088/0960-1317/18/3/035011
| Item Type: | Article |
|---|---|
| InterNano Taxonomy: | Areas of Application > Electronics and Semiconductor Industries |
| Collections: | Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for Nanoscale Chemical-Electrical-Mechanical Manufacturing Systems |
| Depositing User: | Amulya Gullapalli |
| Date Deposited: | 19 Jul 2011 18:31 |
| Last Modified: | 19 Jul 2011 18:31 |
| URI: | http://eprints.internano.org/id/eprint/1659 |
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