Jingyan, Dong and Ferreira, P.M.. (2009) Electrostatically Actuated Cantilever With SOI-MEMS Parallel Kinematic <formula formulatype="inline"><tex Notation="TeX">$XY$</tex></formula> Stage. Journal of Microelectromechanical Systems, 18 (3). p. 641. ISSN 1057-7157
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Official URL: http://dx.doi.org/10.1109/JMEMS.2009.2020371
Item Type: | Article |
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Collections: | Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for Nanoscale Chemical-Electrical-Mechanical Manufacturing Systems |
Depositing User: | Amulya Gullapalli |
Date Deposited: | 19 Jul 2011 18:26 |
Last Modified: | 19 Jul 2011 18:26 |
URI: | http://eprints.internano.org/id/eprint/1660 |
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