Bourne, Keith and Kapoor, Shiv G. and DeVor, Richard E.. (2010) Study of a High Performance AFM Probe-Based Microscribing Process. Journal of Manufacturing Science and Engineering, 132 (3). 030906. ISSN 10871357
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Official URL: http://dx.doi.org/10.1115/1.4001414
| Item Type: | Article |
|---|---|
| InterNano Taxonomy: | Nanomanufacturing Characterization Techniques > Scanning Probe Microscopy |
| Collections: | Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for Nanoscale Chemical-Electrical-Mechanical Manufacturing Systems |
| Depositing User: | Amulya Gullapalli |
| Date Deposited: | 19 Jul 2011 17:53 |
| Last Modified: | 19 Jul 2011 17:53 |
| URI: | http://eprints.internano.org/id/eprint/1671 |
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